Labs and Equipment
Ätzanlage zum Strukturieren von Si-Wafern

Labs and Equipment

Overview of the facilities

German version

Within Physical Engineering there are  three professorships:

"Laser and Plasma Technologies", Prof. Dr. Maria Krikunova

"Photonics and Optical Technologies", Prof. Dr. rer. nat. Martin Regehly and

"Instrumental Analytics and Surface Physics", Prof. Dr. rer. nat. Carolin Schmitz-Antoniak

They operate several laboratories with partly shared equipment:

    Laboratory for Plasma Technology (PLT)
    the Laboratory for Photonics (PHT),
    the Laboratory for Metrology and Spectroscopy (M&S)
    the Laboratory for Laser Materials Processing (LMB)
    the Laboratory for Surface Analytics (OFA)
    the Laboratory for Scanning Electron Microscopy (SEM)
    the Structure of Matter Laboratory (SdM)
    the Laboratory for Metallography (MEFI)
    the Laboratory for Basic Principles of Physics (PPR)
 

Contact Persons:

The Contact Persons are also listed on the pages of the facilities.


    Prof. Dr. rer. nat. Martin Regehly

Prof. Dr. rer. nat. Martin Regehly Prof. Dr. rer. nat. Martin Regehly

Tel.: +49 3375 508 126
Email: martin.regehly@th-wildau.de
House 14, Room A219

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    Prof. Dr. Maria Krikunova

Prof. Dr. Maria Krikunova Prof. Dr. Maria Krikunova

Tel.: +49 3375 508 359
Email: maria.krikunova@th-wildau.de
House 14, Room 209

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    Prof. Dr. rer. nat. Carolin Schmitz-Antoniak

Prof. Dr. rer. nat. Carolin Schmitz-Antoniak Prof. Dr. rer. nat. Carolin Schmitz-Antoniak